YIELD ENGINEERING SYSTEMS

Web site Results

YES-PBV300
...deposition. Standard Applications: Polyimide cure Copper anneal BCB cure Low-k dielectric ...Copper anti-oxidation barrier Copper oxide removal Copper diffusion barrier Moisture
http://www.yieldengineering.com/default.asp?page=285
YES-PBV300
YES-PBV300 chamber design...deposition. Standard Applications: Polyimide cure Copper anneal BCB cure Low-k dielectric ...Copper anti-oxidation barrier Copper oxide removal Copper diffusion barrier Moisture
http://www.yieldengineering.com/default.asp?page=233